Development of Dye-Sensitized Solar Cells with Sputtered N-Doped TiO₂ Thin Films: From Modeling the Growth Mechanism of the Films to Fabrication of the Solar Cells

Table 1

Structural properties of the films.

Deposition condition; (Oxygen flow rate)	Structure	Crystal type	Oxygen defects
			Bulk	Surface
0.2 sccm	Amorphous	—	Yes	Yes
0.6 sccm	Crystalline	Anatase	No	Yes
3.5 sccm	Crystalline	Anatase	No	Yes