Laser Enhanced Hydrogen Passivation of Silicon Wafers

Figure 1

Defect energy levels of transition metal impurities and hydrogen at room temperature without illumination. Donor levels are denoted by 0/+, acceptor levels by −/0, and double donor levels by +/++ [12]. (b) The fractional concentration of the positive, neutral, and negative charge states of hydrogen at 423 K as a function of Fermi level [14].

(a)

(b)