Research Article
Effects of Sheet Resistance on mc-Si Selective Emitter Solar Cells Using Laser Opening and One-Step Diffusion
Table 1
Average lifetime of six SE samples at different check-point stages, which are surface texturization, dry oxidation, laser opening and mask removal, and POCl3 diffusion with ARC deposition, separately. is heavily doped sheet resistance, and is lightly doped sheet resistance (Ω/sq); values inside parentheses are measured.
|