Influence of Substrate on Crystal Orientation of Large-Grained Si Thin Films Formed by Metal-Induced Crystallization

Figure 3

EBSD images of the poly-Si layers with SiO₂, AZO, ITO, and TiN underlayers. (a)–(d) ND and (e)–(h) TD relative to the substrate; the ND and TD maps are of the same regions for each sample. The colors indicate the crystal orientation, according to the inserted color key. The black solid lines in the TD maps indicate random grain boundaries.