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International Journal of Photoenergy
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International Journal of Photoenergy
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2020
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Article
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Fig 3
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Research Article
Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side
Figure 3
TEM picture of Al
2
O
3
/SiO
2
/Si stack after the aluminum oxide was annealed at 600°C for 90 seconds.