Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side

<div>EDS analysis for a sample with the stack of Al<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub>/Si after annealed at 600°C for 90 seconds.</div>

International Journal of Photoenergy

Figure 5: Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side 