Development of an Environmentally Friendly Resist-Removal Process Using Wet Ozone

Table 1

Film thickness, polymers, and solvents.

Polymer samples/solvents	Thickness (μm)
AZ6112	1.35
Novolak resin (𝑀𝑤 = 15000)/PGMEA	0.96
cis-1,4-polyisoprene (𝑀𝑤 = 38000)/xylene	0.40
PVP (𝑀𝑤 = 20000)/ethyl lactate	1.62
PS (𝑀𝑤 = 4000∼20000)/toluene	0.66
PMMA (𝑀𝑤 = 96700)/ethyl lactate	1.30
PVC (𝑀𝑤 = 68750)/cyclohexanone	1.32