Table 3: The damaged layer thickness measured by resist removal using wet ozone, SEM images, and resist removal using chemicals.

Sample Resist removal (wet ozone) damaged layer SEM observation damaged layer Resist removal (chemicals) damaged layer 10 keV (B ions) 40 nm 110 nm 90 nm 70 keV (B ions) 200 nm 500 nm 407 nm 150 keV (B ions) — 830 nm 660 nm 10 keV (P ions) 30 nm — 40 nm 70 keV (P ions) — 330 nm 140 nm 150 keV (P ions) — 500 nm 400 nm