Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films

Table 1

Growth parameters, thickness, and composition of hydrogenated SRN films.

Number of samples	Flow ratio NH3/SiH4	Thickness, nm	Growth temperature, °C	Stoichiometric parameter 𝑥
611	5	240	100	1.3
613	1.5	400	100	0.95
615	0.5	450	100	0.6