Double Pulse LIBS of Titanium-Based PVD-Coatings with Submicron Resolution

Table 2

Radiant flux density and thickness at different distances for negative defocusing.

, mm	−1	−2	−3	−4	−5	−6	−7	−8	−9	−10
, W/cm^2	1500	370	170	93	59	41	30	23	18	15
, μm	3	1.5	1	0.5	0.35	0.2	0.15	0.12	0.105	0.10