Table 1: The resistivities and thickness of the films deposited at various oxygen partial pressures.

SampleSheet resistivity
(Ω/square)
Thickness
(nm)
Resistivity
(mΩ·cm)

ZnO-2 96.1
ZnO-4 94.2
ZnO-8 102.5
ZnO-10 86.9
ZnO-12 122.0
ZnO-15 117.0
ZnO-20 114.9