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ISRN Materials Science
Volume 2013 (2013), Article ID 759462, 5 pages
http://dx.doi.org/10.1155/2013/759462
Research Article

Structural and Optical Properties of Aluminum Nitride Thin Films Deposited by Pulsed DC Magnetron Sputtering

1Materials Processing Division, Bhabha Atomic Research Centre, Trombay, Mumbai 400085, India
2Applied Spectroscopy Division, Bhabha Atomic Research Centre, Trombay, Mumbai 400085, India

Received 17 July 2013; Accepted 28 August 2013

Academic Editors: E. J. Nassar and Y. Sun

Copyright © 2013 R. K. Choudhary et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

R. K. Choudhary, P. Mishra, A. Biswas, and A. C. Bidaye, “Structural and Optical Properties of Aluminum Nitride Thin Films Deposited by Pulsed DC Magnetron Sputtering,” ISRN Materials Science, vol. 2013, Article ID 759462, 5 pages, 2013. doi:10.1155/2013/759462