521701.fig.002a
(a)
521701.fig.002b
(b)
521701.fig.002c
(c)
521701.fig.002d
(d)
Figure 2: XPS spectra of a representative GaN film deposited at 873 K: (a) general survey, (b) Ga2p3/2 core-level spectra, (c) Ga2p1/2 core-level spectra (inset shows the spectra for Ga3p1/2), and (d) N1s core-level spectra.