521701.fig.006a
(a)
521701.fig.006b
(b)
521701.fig.006c
(c)
Figure 6: (a) Variation of versus for a representative GaN film deposited at 873 K. -▲-: theoretical best fit curves. (b) Variation of trap state density ( ) and barrier height ( ) with grain size and (c) variation of stress ( ) with grain size (—■—) and density of trap state ( ) (—▲—) at grain boundary region for GaN films deposited at 873 K.