Table 1: Different quantities related to GaN films obtained from this study.

Sample number and substrate temperature ( ) (eV)Grain size from SEM (nm)
(nm)

(1015 m−2)

(meV)
Stress
(GPa)

GaN-1
473 K
2.90838.3737.20.37
GaN-2
573 K
3.111235.56.633.20.31
GaN-3
673 K
3.211433.26.026.20.25
GaN-4
773 K
3.243530.45.218.10.17
GaN-5
873 K
3.277028.93.112.40.11