151092.fig.001a
(a)
151092.fig.001b
(b)
Figure 1: Surface profiles before and after: (a) the prolonged X-ray radiation and (b) low-temperature annealing. A clear upward, concave profile change can be seen in both (a) and (b) from the height difference data. The maximum deflection at the center is ~140 nm in (a) and ~175 nm in (b).