Recent Progress in Silicon Photonics: A Review

Figure 6

(a) Optical images of fully fabricated 2nd-order (top) and 5th-order (bottom) ring filters by Kotura. (b) SEM of fabricated three-stage filter by MIT group. (c) Measured response spectra of MIT’s three-stage filter, showing high in-band extinction. Figure (a) is taken from [33]. Figures (b) and (c) are taken from [34].

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