About this Journal Submit a Manuscript Table of Contents
ISRN Nanotechnology
Volume 2012 (2012), Article ID 453517, 5 pages
http://dx.doi.org/10.5402/2012/453517
Research Article

UV Illumination Room-Temperature ZnO Nanoparticle Ethanol Gas Sensors

Institute of Microelectronics and Department of Electrical Engineering, Center for Micro/Nano Science and Technology, Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan 70101, Taiwan

Received 10 January 2012; Accepted 9 February 2012

Academic Editors: C. S. Casari, C. Li, and W. Lu

Copyright © 2012 Sheng-Po Chang and Kuan-Yu Chen. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

Zinc oxide (ZnO) nanoparticle gas sensor was formed by spin coating. We annealed the film at 400, 600, and 800°C for 1 hour in air to make gas sensor. The responses of gas sensor to ethanol with UV light illumination were investigated. It could be observed that the ZnO nanoparticle film annealing at 800°C has the highest sensitivity. It can be attributed to the defects of ZnO nanoparticle film annealing at 800°C much more than other annealing temperatures. The study shows that the ZnO nanoparticles have potential applications as RT ethanol sensors.