Research Article

Production of Nanopowders of Metal Oxides Using Pulsed Electron Beam in Low Pressure Gas

Table 1

Installation characteristics of the “Nanobeam  2”.

No.CharacteristicsValue

1Power consumption, κVA, no more than 5
2Power supply 380 V (3 ph.), 50 Hz
3Pulse width, μs50–100
4Pulse repetition rate, pps up to 500
5Accelerating voltage, kVup to 40
6Beam current on a target, A0,46
7Beam diameter on a targets, mm1,5
8Pressure limits of regulation in the evaporation chamber, Pa 10-1-105
9Inleakage gas speed to the the evaporation chamber, l/hour to 63
10Weights of installation, kg, no more than700
11Area of placing of installation, m*m 3*3