Table 1: Properties of the neutral beam splitter ( 𝑛 0 = 1 . 0 , 𝑛 𝐿 = 1 . 4 5 , 𝑛 𝐻 = 2 . 3 5 , 𝑛 𝑠 = 1 . 5 2 ).

d(nm)Conventional design 1Conventional design 2Sensitivity control design 1Sensitivity control design 2
SubstrateMassive

1H9.4167.83611.346116.6216
2L70.04055.30535.470928.0701
3H24.59731.419113.1081139.6693
4L87.87823.621164.33717.5744
5H21.94182.43972.6831135.0514
6L87.77544.96093.564685.1263
7H58.53326.88835.505454.3485
8L114.75586.48291.1863
9H57.27955.507215.1898
10L65.784115.31787.6283
11H52.603
12L64.619

AirMassive

𝐹 0.02000.00260.10460.0832
𝑆 0.13910.14660.06030.0595
𝐹 𝐹 0.37350.38290.26680.2577