Research Article
Influence of Sound Vibration on Diamond-Like Carbon Deposition Rate
Table 1
Experimental variables.
| S. number | Parameters | Range |
| (1) | Pressure | 20–30 Torr | (2) | Substrate (nicrom) heater temperature | 800–1000°C | (3) | Activation (tungsten) heater temperature | 1800–2000°C | (4) | Substrate (nicrom) heater power | 1000 watt | (5) | Substrate (nicrom) heater voltage | 80–100 V | (6) | Substrate (nicrom) heater current | 7–10 amp | (7) | Activation (tungsten) heater power | 200 watt | (8) | Activation (tungsten) heater voltage | 5–7 V | (9) | Activation (tungsten) heater current | 25–35 amp | (10) | Flow rate (CH4 gas) | 0.1–1.5 L/min | (11) | Gap between substrate and Tungsten heater | 2.5–8.0 mm | (12) | Sound frequency | 0–110 kHz | (13) | Deposition duration | 3–10 minutes | (14) | Substrate size | 22 mm × 14 mm × 1.15 mm |
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