Development of a New Piezoelectric Actuator with Slits

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="172054.fig.0010a" src="https://static.hindawi.com/articles/isrn/volume-2013/172054/figures/172054.fig.0010a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>Non slit</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="172054.fig.0010b" src="https://static.hindawi.com/articles/isrn/volume-2013/172054/figures/172054.fig.0010b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>Outside slit</td></tr></table></td></tr><tr class="fig-image" id="c"><td><img alt="172054.fig.0010c" src="https://static.hindawi.com/articles/isrn/volume-2013/172054/figures/172054.fig.0010c.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(c) </b>Cross slit</td></tr></table></td></tr></table>

<table>Comparison of volumetric change of the optimized unimorph and bimorph actuators among three types of fixed condition.</table>

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Figure 10

Figure 10: Development of a New Piezoelectric Actuator with Slits 