Development of a New Piezoelectric Actuator with Slits

Table 1

Material properties of PZT ceramics.

Elastic stiffness constant (GPa)		Piezoelectric stress constant (pC/m^2)		Relative dielectric constant
𝐶^𝐸11,𝐶^𝐸22	1.3 × 10^2	𝑒13,𝑒23	−16.2	∈^𝑆11,∈^𝑆22	4400
𝐶^𝐸12	86.6	𝑒33	21.6	∈^𝑆33	5500
𝐶^𝐸13,𝐶^𝐸23	86.0	𝑒24,𝑒15	19.7
𝐶^𝐸33	1.2 × 10^2
𝐶^𝐸44,𝐶^𝐸55	24.0
𝐶^𝐸66	29.5