Semiconductor Characterization by Scanning Ion Beam Induced Charge (IBIC) Microscopy
Figure 4
(a) IBIC image of a single diamond crystallite from the coplanar polycrystalline diamond detector. The image was acquired using a 2 MeV-proton beam and with a bias voltage of 370 V. The colour scale shows charge signal amplitude in arbitrary units. The image size is μm2. (b) IBIC proton height spectra extracted from region labeled A–D. Reprinted from [71] with permission from Elsevier.
