Semiconductor Characterization by Scanning Ion Beam Induced Charge (IBIC) Microscopy
Figure 5
Ion beam induced charge maps using a scanned 2 MeV microprobe collection in CVD diamond at various temperatures. The location of the electrodes is shown. Note that the charge collection efficiency is always highest near to the anode. Reprinted with permission from [73]. Copyright 2004, American Institute of Physics.
