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ISRN Materials Science
Volume 2013 (2013), Article ID 710798, 7 pages
http://dx.doi.org/10.1155/2013/710798
Research Article

Influence of Oxygen on Zinc Oxide Films Fabricated by Ion-Beam Sputter Deposition

1Department of Physics, Fu Jen Catholic University, Hsinchuang, New Taipei City 24205, Taiwan
2Graduate Institute of Applied Science and Engineering, Fu Jen Catholic University, Hsinchuang, New Taipei City 24205, Taiwan

Received 25 June 2013; Accepted 30 July 2013

Academic Editors: Z. Jiang and H. Saxén

Copyright © 2013 Jin-Cherng Hsu and Yueh-Sheng Chiang. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [1 citation]

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  • Xiaoli Zhao, Jie Jin, Jui-Ching Cheng, Jyh-Wei Lee, Kuo-Hong Wu, Kuo-Cheng Lin, Jung-Ruey Tsai, and Kou-Chen Liu, “Structural and optical properties of zirconia thin films deposited by reactive high-power impulse magnetron sputtering,” Thin Solid Films, 2014. View at Publisher · View at Google Scholar