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International Scholarly Research Notices
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International Scholarly Research Notices
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2013
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Article
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Fig 3
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Research Article
Structural and Optical Properties of Aluminum Nitride Thin Films Deposited by Pulsed DC Magnetron Sputtering
Figure 3
AFM micrographs of AlN film deposited for (a) 30, (b) 50, and (c) 80% flow ratio of nitrogen/argon.
(a)
(b)
(c)