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Journal of Atomic, Molecular, and Optical Physics
Volume 2011 (2011), Article ID 295304, 6 pages
http://dx.doi.org/10.1155/2011/295304
Research Article

Aging of Oxygen-Treated Trimethylsilane Plasma-Polymerized Films Using Spectroscopic Ellipsometry

1Physics Department, Islamic University of Gaza, P.O. Box 108, Gaza, Palestine
2Physics Department, University of Missouri-Kansas City, Kansas City, MO 64110, USA

Received 6 June 2011; Accepted 2 August 2011

Academic Editor: Edward E. Eyler

Copyright © 2011 Taher M. El-Agez et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Taher M. El-Agez, David M. Wieliczka, Chris Moffitt, and Sofyan A. Taya, “Aging of Oxygen-Treated Trimethylsilane Plasma-Polymerized Films Using Spectroscopic Ellipsometry,” Journal of Atomic, Molecular, and Optical Physics, vol. 2011, Article ID 295304, 6 pages, 2011. doi:10.1155/2011/295304