Journals
Publish with us
Publishing partnerships
About us
Blog
Journal of Atomic and Molecular Physics
Table of Contents
Special Issues
Journal of Atomic and Molecular Physics
/
2011
/
Article
/
Fig 3
/
Research Article
Aging of Oxygen-Treated Trimethylsilane Plasma-Polymerized Films Using Spectroscopic Ellipsometry
Figure 3
Suggested model for oxygen-treated TMS film on silicon wafer.