Table 2: The effective medium approximation applied on oxygen-treated TMS films after aging for 1 day. The obtained atomic ratios are compared to XPS results.

(nm)
XPSEMAXPSEMA

7001.6721.7531.4550.550.45NA2NA0.56
6001.6811.7871.4580.680.32NA1.85NA0.64
5001.7091.821.4620.70.3NA1.9NA0.62
4201.7491.8471.4680.750.25NA2NA0.53