Table 3: The effective medium approximation applied on oxygen-treated TMS films after aging for 50 days. The obtained atomic ratios are compared to XPS results after 50 days.

(nm)
XPSEMAXPSEMA

7001.6161.7531.4550.530.471.351.30.70.88
6001.6231.7871.4580.520.481.351.20.70.93
5001.6481.821.4620.530.471.351.230.70.90
4201.6761.8471.4680.550.451.351.470.70.80