Review Article

Optical Response Near the Soft X-Ray Absorption Edges and Structural Studies of Low Optical Contrast System Using Soft X-Ray Resonant Reflectivity

Figure 14

Simulated reflectivity profile at 187.5 eV for 60 nm B4C thin film with a low density B4C layer of 1.3 nm (a) depth sensitivity with porosity 35%. (b) Sensitivity to porosity.
649153.fig.0014a
(a)
649153.fig.0014b
(b)