Table 2: Frequencies (cm−1) of major infrared bands observed in wafer samples and peak assignment.

Frequency cm−1Predicted peak
ABCDEF

1127Si–O str
1250125012581258Si–O–C as str
1295–1305–(CH2)–str
1445–1475–O–CH2–str
1531Amide II
16351642C=O str
1650Saturated primary ammine (–NH2 def)
1650–16801638–1687Amide I C=O str
1685–17051774C=O str
3121N–H str
3250–3677Primary ammine –NH2 str

A, B, C, D, E, and F are referred to the samples as indicated in Figure 2.