Fabrication of Transparent Conductive Zinc Oxide Co-Doped with Fluorine and Zirconium Thin Solid Films by Ultrasonic Chemical Pyrolysis: Effects of Precursor Solution Aging and Substrate Temperature
Figure 2
X-ray diffraction patterns of ZnO:F:Zr thin films deposited at °C, utilizing the precursor solutions of (a) 1 day, (b) 9 days, and (c) 20 days of aging time.
