Research Article

Fabrication of Transparent Conductive Zinc Oxide Co-Doped with Fluorine and Zirconium Thin Solid Films by Ultrasonic Chemical Pyrolysis: Effects of Precursor Solution Aging and Substrate Temperature

Table 1

Crystallite size and thickness for the different substrate temperatures.

Time of aging of the solution (days)Substrate temperature (°C)Crystallite size (nm) ±10%Thickness
(nm)

150020.18530
950047.95535
2050099.55540