Structure and Friction Behavior of CrN_𝑥/a-C:H Nanocomposite Films

Table 1

The deposition parameter and compositions of the as-deposited films.

Sample no.	Deposition conditions
	N2 (sccm)	CH4 (sccm)	Ar (sccm)	CH4 content
C1	160	0	40	0
C2	140	20	40	10%
C3	120	40	40	20%
C4	100	60	40	30%
C5	80	80	40	40%
C6	60	100	40	50%