Research Article
Processing Chip for Thin Film Bulk Acoustic Resonator Mass Sensor
Table 1
Measurement results of sensor signal processing circuit.
| | Reference signal/Hz | Sensor
signal/Hz | Measured difference/Hz | Accidental
error/Hz |
| | 1 899 000 000 | 1 898 975 000 | 25 000 | ±1 000 | | 1 899 000 000 | 1 898 900 000 | 100 000 | ±1 000 | | 1 899 000 000 | 1 889 000 000 | 10 000 000 | ±1 000 | | 1 899 000 000 | 1 874 000 000 | 25 000 000 | ±1 000 |
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