Recent Developments in the X-Ray Reflectivity Analysis for Rough Surfaces and Interfaces of Multilayered Thin Film Materials
Figure 7
Calculated reflectivity from a GaAs layer with a thickness of 48 nm on a Si substrate. The solid curve is for a flat surface and a flat interface. The dashed curve is for a surface roughness of 4 nm and a flat interface, while the dotted curve is for a surface roughness of 4 nm and interface roughness of 4 nm.