Direct Current Magnetron Glow Discharge Plasma Characteristics Study for Controlled Deposition of Titanium Nitride Thin Film

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</svg> Torr at Ar : N<sub>2</sub> = 1 : 1.</table>

Journal of Materials

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Figure 2

Figure 2: Direct Current Magnetron Glow Discharge Plasma Characteristics Study for Controlled Deposition of Titanium Nitride Thin Film 