Figure 1:
NEXAFS spectra, which are decomposed with an error-function step and Gaussians, of (a) UNCD/a-C:H film deposited at
𝑇
s
=
5
5
0
°C and
𝑃
H
2
=
5
3
.
3
Pa, (b) a-C film deposited at
𝑇
s
=
5
5
0
°C in vacuum, and (c) a-C:H film deposited at
𝑇
s
=
RT and
𝑃
H
2
=
5
3
.
3
Pa.