Structure and Optical Properties of Silicon Nanocrystals Embedded in Amorphous Silicon Thin Films Obtained by PECVD

Figure 1

Representative HRTEM images for six samples grown with different dichlorosilane to hydrogen flow rate ratios (𝑅) and RF powers. The circular inserts show the Small Area Diffraction Patterns of the samples, and the square inserts show the size distributions and number densities of the silicon nanocrystalline inclusions.

(a) sample with 𝑅=0.1 and 10 Watt of RF power

(b) sample with 𝑅=0.1 and 50  Watt of RF power

(c) sample with 𝑅=0.1 and 150  Watt of RF power

(d) sample with 𝑅=0.05 and 10  Watt of RF power

(e) sample with 𝑅=0.05 and 50  Watt of RF power

(f) sample with 𝑅=0.05 and 150  Watt of RF power