Structural and Mechanical Properties of CrNx Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance
Figure 4
AFM morphologies of CrNx coatings deposited at of 50 mm (a), 90 mm (b), and 140 mm (c). The images on the left-hand side are of samples prepared without ion source, and those on the right-hand side are of samples prepared with ion source assistance.
