Table 1: Proportion of elements in the α-HfIZO active layer.

ElANSeriesunn. [wt.%]norm. [wt.%]Atom. [at.%]Error [wt.%]

O8K-series13.3513.0157.132.9
Hf72M-series59.1757.6522.692.7
In49L-series25.1324.4814.981.1
Zn30L-series4.984.855.210.4

Total:102.62100.00100.00