Table 1:
Proportion of elements in the
α
-HfIZO active layer.
El
AN
Series
unn.
[wt.%]
norm.
[wt.%]
Atom.
[at.%]
Error [wt.%]
O
8
K-series
13.35
13.01
57.13
2.9
Hf
72
M-series
59.17
57.65
22.69
2.7
In
49
L-series
25.13
24.48
14.98
1.1
Zn
30
L-series
4.98
4.85
5.21
0.4
Total:
102.62
100.00
100.00