Research Article
Optical and Structural Properties of Silicon Nanocrystals Embedded in SiOx Matrix Obtained by HWCVD
Table 1
Main bonds of the films grown at different temperatures.
| Vibration type |
Vibration of obtained in this work (cm−1) | Reference | 1000°C | 900°C | 800°C |
| Si–O–Si rocking | 450 | 452 | 448 | [17] | Si–O–Si bending | 800 | 801 | 798 | [17] | Si–O–Si stretching | 1080 | 1077 | 1066 | [18] | SiH bending | 878 | 880 | 881 | [19] | SiH wagging | 660 | 670 | 674 | [20] |
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