Research Article

Optical and Structural Properties of Silicon Nanocrystals Embedded in SiOx Matrix Obtained by HWCVD

Table 1

Main bonds of the S i O 𝑥 films grown at different temperatures.

Vibration type Vibration of S i O 𝑥 obtained in this work (cm−1)Reference
1000°C900°C800°C

Si–O–Si rocking450452448[17]
Si–O–Si bending800801798[17]
Si–O–Si stretching108010771066[18]
SiH bending878880881[19]
SiH wagging660670674[20]