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Journal of Nanomaterials
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Journal of Nanomaterials
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2012
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Article
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Tab 2
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Research Article
Optical and Structural Properties of Silicon Nanocrystals Embedded in SiO
x
Matrix Obtained by HWCVD
Table 2
Composition data of the silicon oxide phase by FTIR and composition data of the whole film found by EDAX.
Growth temperature (
°
C)
Composition by EDAX
Composition of
S
i
O
𝑥
phase by FTIR
Coefficient
x
x
𝑎
𝑏
800
1.2
1.82
0.34
0.65
900
1.11
1.96
0.43
0.56
1000
0.72
2
0.64
0.36