Optical and Structural Properties of Silicon Nanocrystals Embedded in SiO<sub><i><b>x</b></i></sub> Matrix Obtained by HWCVD

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr class="thead"><td align="left" rowspan="2">Growth temperature (<sup>°</sup>C)</td><td align="center">Composition by EDAX</td><td align="center">Composition of <svg height="14.8" id="M38" style="vertical-align:-3.21404pt" version="1.1" viewbox="0 0 31.0875 14.8" width="31.0875" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,14.8)">
<g transform="translate(72,-60.16)">
<text transform="matrix(1,0,0,-1,-71.95,63.41)">
<tspan style="font-size: 12.50px; " x="0" y="0">S</tspan>
<tspan style="font-size: 12.50px; " x="6.9516678" y="0">i</tspan>
<tspan style="font-size: 12.50px; " x="10.427502" y="0">O</tspan>
</text>
<text transform="matrix(1,0,0,-1,-52.5,60.28)">
<tspan style="font-size: 8.75px; " x="0" y="0">𝑥</tspan>
</text>
</g>
</g>
</svg> phase by FTIR</td><td align="center" colspan="2">Coefficient</td></tr><tr class="thead"><td align="center"><i>x</i></td><td align="center"><i>x</i></td><td align="center"><span style="width: 7.9749999px;"><svg height="7.1750002" id="M39" style="vertical-align:-0.1254pt" version="1.1" viewbox="0 0 7.9749999 7.1750002" width="7.9749999" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,7.175)">
<g transform="translate(72,-66.26)">
<text transform="matrix(1,0,0,-1,-71.95,66.44)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝑎</tspan>
</text>
</g>
</g>
</svg></span></td><td align="center"><span style="width: 7.4749999px;"><svg height="10.7375" id="M40" style="vertical-align:-0.13794pt" version="1.1" viewbox="0 0 7.4749999 10.7375" width="7.4749999" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,10.7375)">
<g transform="translate(72,-63.41)">
<text transform="matrix(1,0,0,-1,-71.95,63.6)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝑏</tspan>
</text>
</g>
</g>
</svg></span></td></tr><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr><td align="left">800</td><td align="center">1.2</td><td align="center">1.82</td><td align="center">0.34</td><td align="center">0.65</td></tr><tr><td align="left">900</td><td align="center">1.11</td><td align="center">1.96</td><td align="center">0.43</td><td align="center">0.56</td></tr><tr><td align="left">1000</td><td align="center">0.72</td><td align="center">2</td><td align="center">0.64</td><td align="center">0.36</td></tr><tr class="table-tr"><td colspan="5"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Composition data of the silicon oxide phase by FTIR and composition data of the whole film found by EDAX.

Journal of Nanomaterials

tab2

Table 2

Table 2: Optical and Structural Properties of Silicon Nanocrystals Embedded in SiO<sub><i><b>x</b></i></sub> Matrix Obtained by HWCVD 

Journal of Nanomaterials

Optical and Structural Properties of Silicon Nanocrystals Embedded in SiOx Matrix Obtained by HWCVD

Table 2

Optical and Structural Properties of Silicon Nanocrystals Embedded in SiO_x Matrix Obtained by HWCVD