Zigzag and Helical AlN Layer Prepared by Glancing Angle Deposition and Its Application as a Buffer Layer in a GaN-Based Light-Emitting Diode

Figure 4

Simulation of ray tracing for various AlN nanorod structures.

(a) 𝛼=0^∘

(b) Oblique 𝛼=80^∘

(c) Zigzag 𝛼=±80^∘

(d) Helical 𝛼=80^∘