SEM micrographs of (a) Ni electrode array, (b) array of MWCNT bundles on an electrode pad, (c) and (d) array of MWCNTs on Ni spots patterned by UV-lithography and e-beam lithography, respectively, (e) and (f) the surface of polished MWCNT array electrodes grown on 2 μm and 200 nm spots, respectively. 45° perspective view was used for (a–d) and (e-f) were top views. The scale bars for (a), (b), (c), (d), (e), and (f) are 200, 50, 2, 5, 2, and 2 μm, respectively, reprinted with permission from [64], Copyright 2003 American Chemical Society.
