Raman Spectroscopy of DLC/a-Si Bilayer Film Prepared by Pulsed Filtered Cathodic Arc

Table 1

Thickness of DLC and a-Si layers, DLC/a-Si thickness ratio, and total thickness of DLC/a-Si film.

Thickness		DLC/a-Si
DLC layer; (nm)	a-Si layer; (nm)	Thickness ratio	Total thickness (nm)
2	2	2/2	4
2	6	2/6	8
4	4	4/4	8
6	2	6/2	8
9	6	9/6	15