Research Article

Elastic Modulus Determination of Al-Cu Film Alloys Prepared by Thermal Diffusion

Table 1

The mean elastic modulus of Al-Cu alloys, Al and Cu with different thickness.

Thickness (nm)Al-Cu (GPa)Al (GPa)Cu (GPa)

50 1 0 4 . 6 ± 6 . 2 1 2 9 . 1 ± 4 . 2 1 0 7 . 1 ± 4 . 6
100 9 9 . 1 ± 1 . 8
150 1 0 6 . 1 ± 5 . 5
200 7 7 . 8 ± 1 . 6
250 8 2 . 7 ± 5 . 6